Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment
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چکیده
منابع مشابه
Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment
This paper presents the design of a wireless pressure-monitoring system for harsh-environment applications. Two types of ceramic pressure sensors made with a low-temperature cofired ceramic (LTCC) were considered. The first type is a piezoresistive strain gauge pressure sensor. The second type is a capacitive pressure sensor, which is based on changes of the capacitance values between two elect...
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ژورنال
عنوان ژورنال: Sensors
سال: 2011
ISSN: 1424-8220
DOI: 10.3390/s120100320